SemiAnalysis 指出铜在先进封装中开始接近散热极限,Semicon Taiwan 上展出的 Cu/钻石复合材料导热率约 800 W/m·K,约为纯铜 400 W/m·K 的两倍,可加快散热、减少局部热点,并将热膨胀系数调至约 6–10 ppm/K,缓解铜与硅之间的翘曲问题。
AI 生成摘要 · 以原文为准
Copper is starting to hit its limits in advanced packaging.
Pure Cu is ~400 W/m·K, while at Semicon Taiwan there are debut of Cu/diamond composites reaching ~800 W/m·K, helping spread heat faster and reduce local hotspots. They can also reduce warpage: silicon is ~3 ppm/K CTE vs copper at ~17 ppm/K, while Cu/diamond can be tuned closer to ~6–10 ppm/K.
The challenge is the Cu/diamond interface. Copper does not naturally bond well with diamond, so Ti, Cr, Mo, or W are often added to form a carbide bonding layer. But too much carbide hurts thermal conductivity, making interface thickness critical. Compared with simply alloying Cu, the industry is working on pre-coating diamond particles using PVD or CVD giving much tighter control.
来源:SemiAnalysis · x.com